| No. | Item | Specification |
|---|---|---|
| 1 | Model | ADFR-FT4 |
| 2 | Material | ADFR-Polymer |
| 3 | Dimensions | Outer Diameter Φ8 mm, Inner Diameter Φ4 mm |
| 4 | Friction Coefficient | ≥4 on polished wafer surface; ≥3 on wafer surface (Ra 0.3 μm) |
| 5 | Normal Adhesion Force | ≤0.02 N on wafer surface |
| 6 | Service Life | 1 year / 1,000,000 cycles *, whichever comes first |
| 7 | Operating Temperature | Long-term: -40 ℃ ~ 260 ℃ |
| 8 | Operating Pressure | Atmospheric pressure or vacuum environment |
| 9 | Ambient Cleanliness | Class 100 or higher cleanroom |
| 10 | Applicable Wafer Materials | SSi, Glass, SiN, SiO₂, Ceramic |
| 11 | Applicable Substrate Shapes | Circular, square, annular, etc. |
