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Wafer Handling Vacuum Suction Cup
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Applications
The vacuum suction cup is mounted on the end effector of wafer handling robotic arms. Combined with the negative pressure generation system, it enables secure gripping, precise positioning, translational transfer, and wafer flipping. The product meets strict high cleanliness and high reliability requirements in automated wafer handling processes, featuring ultra-low normal adhesion, low outgassing and mark-free performance.

Technical Specifications

No.ItemSpecification
1SizeCustomized
2MaterialFKM /FFKM/ slicone
3Mounting MethodMechanical fixation / Adhesive backing fixation
4Service Life

≥ 100,000 cycles

5Operating Temperature-40℃-300℃