| No. | Item | Unit | Value | Remarks |
|---|---|---|---|---|
| 1 | Material | - | Rubber | Polyester industrial rubber |
| 2 | Service Life | Cycles | 1,000,000 | - |
| 3 | Flatness | μm | ＜10μm | Measured by laser |
| 4 | Adhesion Force | N | 15 | Tested on quartz glass under 10 N preload |
| 5 | Operating Temperature | ℃ | ＜ 90 ℃ | Adhesion force decreases as temperature rises |
| 6 | Cleaning Method | - | IPA/Ethanol | Wipe with lint-free cloth; soaking is prohibited |
- | Electrostatic Adsorption | Physical Adsorption |
|---|---|---|
Adsorption Principle | Coulomb Force | Intermolecular Force |
Contact Material | Polyimide | Microstructured Rubber |
Lamination Precision | Prone to center offset caused by residual static electricity | Extremely stable |
Adsorption Time | Milliseconds to seconds; affected by charging/discharging and dielectric polarization | Milliseconds; responds immediately upon contact |
Static Electricity Risk | Static electricity easily occurs | No static electricity generation |
Failure Performance | Greatly affected by foreign contaminants, high failure rate & inconvenient replacement | Slight impact from impurities, easy to replace and low failure rate |
Industries: LCD, OLED, Semiconductor
Processes: Vacuum Lamination, Vacuum Deposition, Advanced Packaging, Wafer Handling
Equipment: Vacuum Bonders, PVD Systems, CVD Systems, Packaging Equipment
Workpieces: Glass Substrates, Silicon Wafers, Ceramics, Thin Films
