| No. | Item | Specification |
|---|---|---|
| 1 | Model | ADSR-F15 (Normal Temperature Version) ; ADSR-HFT15 (High Temperature Version) |
| 2 | Normal Adhesion Force | ≤ 0.15 N/cm² on wafer surface |
| 3 | Dimensions | Outer Diameter Φ15 mm, Inner Diameter Φ5 mm, Thickness 0.5~2 mm (Customizable) |
| 4 | Friction Coefficient | > 2 at room temperature to 100 °C; > 1.5 above 100 °C |
| 5 | Operating Temperature & Service Life | Long-term: Room temperature ~ 260 ℃ (short-time peak); Service life: 1 year |
| 6 | Applicable Environment | Atmospheric pressure / Vacuum; Cleanroom Class 1000 or higher |
| 7 | Applicable Wafer Shapes | Circular, square, annular, etc. |
| 8 | Applicable Wafer Materials | Si, Sapphire, Glass, LiTaO₃, SiO₂ |
High tangential friction force & low normal adhesion force
Easy to use, simple operation and reusable
High temperature resistance with stable performance
Leaves no residual marks and will not damage the transported surface
